Predictive maintenance for semiconductor fabs and assembly-test plants
How do we keep fab and assembly-test support equipment running without disturbing production?
DHMSCare monitors the support equipment a fab or assembly-test plant depends on — process cooling water pumps, Roots dry vacuum pumps and wafer vacuum pumps, exhaust and scrubber fans, chillers and compressors for compressed dry air and nitrogen, and DI water pumps.
Wireless vibration and temperature sensors sit on motor and bearing housings, compare each asset against its own baseline, and flag early wear before a support-system failure disturbs the cleanroom environment.
Industry challenges
Fans, pumps, chillers and compressors run continuously. When one fails, the cleanroom environment and the production schedule are disturbed.
Bearing wear on pumps and motors develops quietly. By the time it is audible or hot, the asset is close to failure.
A support-system trip can idle a production line. Recovery in a fab or assembly-test plant takes time and disturbs the environment.
Fabs and assembly-test plants run near-continuously. Inspection and repair must be planned around production, so teams need early, specific signals.
Quantifiable value
Monitoring solution
Focus monitoring on the bearings and motors of fab and assembly-test support equipment: process cooling water pumps, Roots dry vacuum pumps and wafer vacuum pumps, exhaust and scrubber fans, chillers and compressors for CDA and N2, and DI water pumps.
Platform
DHMSCare uses AI to identify early fault signs such as gear wear and bearing anomalies, assess equipment health and provide maintenance recommendations.
Recommended measuring points and plan
What a typical production line needs, so you can see the whole plan before we talk.
| Asset | Suggested sensors | Measuring points (bearing seats) |
|---|---|---|
| Process cooling water pump | 2 | Motor DE and NDE bearings |
| Roots dry vacuum pump | 3 | Motor and pump bearing housings |
| Exhaust fan | 2 | Motor bearing seats |
| Chiller / CDA & N2 compressor | 3 | Motor and compressor bearing seats |
| Scrubber fan | 2 | Motor bearing seats |
| DI water pump | 2 | Motor DE and NDE bearings |
| Wafer vacuum pump | 2 | Motor and pump bearing housings |
Actual quantities are confirmed on site
AI Care
The first plan with AI fault diagnostics, the AI that finds the gear wear and bearing anomalies behind these results.
Choose AI Care Plus for unlimited automatic diagnostics, remaining-life forecasts with Mina Ultra and 24 months data retention.
Smaller teams can start on Care: AI condition monitoring and daily reports with 10 user accounts, then move to AI Care when you need AI fault diagnostics.
Start with one line
The smallest sensible start, then grow line by line or roll out plant-wide.
Watch the machines you can least afford to stop.
You learn about faults days ahead.
All your lines, all sites, on one dashboard.
Tailored to your project's requirements.
Runs on your own servers or private cloud.
Contracted and delivered as a project.
Questions
We are a small or mid-sized company. Is this for us?
Yes. Start with one line and one gateway, subscribe per sensor per year, and begin on AI Care; Care if you only need condition monitoring.
How long does a one-line pilot take?
Installation follows the seven steps in our quick installation guide: create the equipment, mount the gateway, attach the sensors and bind the measuring points. We agree the pilot period with you by line size.
We have no vibration engineer. Can we still use it?
Yes. The AI identifies early fault signs, assesses equipment health and gives maintenance recommendations, and Mina tells you which machine to handle first and why.
Do the sensors come into contact with the process?
No. Wireless vibration and temperature sensors mount on the outside of motors and bearing housings and send readings through the DMG310 gateway. They do not touch process media.
What does a fab or assembly-test plant need to start monitoring?
One DMG310 gateway and sensors on the first support assets — pumps or fans. Installation follows the quick installation guide: create the equipment, mount the gateway, attach the sensors and bind the measuring points.
Tell us the line and its critical assets; we size the sensors and the plan with you.